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- Vertical TFT, Very thin GI TFTThin insulator  IV 특성

- IGZO-Metal-IGZO-diffusion

- 양극산화

- Metal 산화

 

Year Title Thick of GI
GI Process
Active    
             
2008

USA

           
2005

UK

Low-voltage, high-performance organic field-effect transistors with an ultra-thin TiO2 layer as gate insulator TlO2. 15nm Anodic oxidation of Ti

Constant-current mode (j = 0.5 mA/cm2)in 10-3 M citric acid (99+ %, Aldrich, UK) to the desired voltage VA=5 V, 10 V, and 20 V

2.4 uF/cm2

 

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PTTA