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Vertical TFT

Year Title Spacer/Act. S/D, GI    
           
2016

KASIT

Oxide Vertical TFTs for the Application to the Ultra High Resolution Display - SID SiO2(500nm)

IGO

ITO(150nm)

Al2O3

           
?

South China U.

 

Vertical Channel ITO-stabilized ZnO Thin-Film Transistors SiO2/ZnO ITO/SiO2
           
           
           
           
- Vertical TFT, Very thin GI TFTThin insulator  IV 특성

-IGZO-Metal-IGZO-diffusion

- 양극산화

- Metal 산화