Thin insulator IV 특성
- Vertical TFT, Thin insulator IV 특성
- 양극산화
- Metal 산화
| Year | Title | Metal | Oxide | Anneal. | |||||||||||||||||||||||||||||||
| 2012 SKKU |
Electrical effect of titanium diffusion on amorphous indium gallium zinc oxide | Ti | IGZO IGZO
PECVD SiOx passivation
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Mo/IGZO/Ti 다이오드
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| 2008 USA |
Effects of dielectric thickness and contact area on current-voltage characteristics of thin film metal-insulator-m | NiO 5nm by Plasma oxidation of Ni |
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| 2005 | Leakage current and breakdown electric-field studies on ultrathin atomic-layer-deposited Al2O3 on GaAs | Al2O3 1.5 ~ 6 nm by ALD |
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