HOME,  AZO열처리 효과

Oxide TFT 열처리 효과, 

 

 

 

 

 

 

열처리후  세가지 경우가 보고 되고 있음

1. 소스드레인 전류가 높으면서 모듈레이션이 되지 않다가 열처리 후 오프 전류가 낮아지고 모듈레이션이 됨

2. 소스드레인 전류가 낮으면서 모듈레이션이 되지 않고 열처리 후 모듈레이션이 됨

3. 모듈레이션이 어느 정도 되며 열처리 후 특성이 더 좋아짐

       

 

 

 

 

Year Authors Title IGZO GI Post Ann.  
2015

Arizona State U.

학위온문

Muhammad Ruhul Hasin Post processing Treatment of InGaZnO Thin Film Transistors for Improved Bias-Illumination Stress Reliability      
2009

TIT, Japan

Toshio Kamiya, Kenji Nomura, and Hideo Hosono Origins of High Mobility and Low Operation Voltage of Amorphous Oxide TFTs: Electronic Structure,
Electron Transport, Defects and Doping
      the improvement of the Hall mobility is not associated with crystallization but with structural relaxation by keeping the amorphous structure. The structural relaxation starts at a rather low temperature of
C, but higher tem-
peratures, e.g.,
300 C would be necessary to enhance the
structure relaxation.
2008

Ryukoku U., TIT

Mutsumi Kimura,Takashi Nakanishi, Kenji Nomura, Toshio Kamiya, and Hideo Hosono Trap densities in amorphous-InGaZnO4 thin-film transistors
Mutsumi
      열처리 후 밴드갭 내의 defect state 감소(300 °C in air for 1 h)

 

2011

H.J, Kim Younsei 

 Hyun Soo Shina, Byung Du Ahnb, You Seung Rima and Hyun Jae Kima Annealing temperature dependence on the positive bias stability of IGZO
thin-film transistors
 
RF Magnetron Sputtering

In2O3:Ga2O3:ZnO=1:1:1 mol%)

Ar:O2 = 65:35   1mTorr

Thermal SiO2 for 3 h in air, at
400◦C, 500◦C, 600◦C, and 700◦C