| Year | Authors | Title | IGZO | |||||||||||||||
| 2014 NAIST,Uraoka LAB, Japan |
Yoshihiro UEOKA | Analysis of Electronic Structure on Amorphous Indium-Gallium-Zinc-Oxide for Flexible Printed Display |
|
IGZO was deposited under 4, 4.5, and 5% O2 in Ar at a pressure of 0.6 Pa by RF magnetron sputtering at room temperature |
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