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== 산화물 공정 ==
산화물 TFT 공정 셋업 관련 자료
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JID Annealing temperature dependence on the positive bias stability of IGZO thin-film transistors
130410 Defect reduction in photon-accelerated negative bias instability of InGaZnO thin-film transistors by high-pressure water vapor annealing
11_APL98,103509] Effect of high-pressure oxygen annealing on NBIS-induced instability of IGZO TFTs
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